Compact CRDS analyzer for determining moisture in gases
SHINYEI is the first Japanese manufacturer to successfully develop a CRDS trace moisture meter. It is the world's fastest-responding product in the trace moisture range. It can measure trace moisture levels from 12 ppbv to 20 ppmv (-100 to -55 °CDP). Lower detection limits are also available upon request.Target industries
- Production, inspection, and filling processes for high-purity gases for the semiconductor industry
- Research and manufacturing processes for solid-state batteries
- Glove boxes, insulators, drying chambers, and much more.
Benefits and Strengths
Direct measurement method without calibration curve!
Humidity measuring devices that utilize moisture adsorption and desorption, such as alumina sensors, calculate the amount of moisture based on the change in the electrical state, such as the sensor's capacitance, resulting from the amount of moisture. A calibration curve is created independently for each sensor by the manufacturer. Deviations from the calibration curve due to sensor drift during operation or over time must be corrected each time using the results of a comparison calibration with a standard.
SHINYEI CRDS is referred to as an absolute measurement method because it can be calculated directly from measured values of known physical constants without the need for calibration curves and essentially does not require calibration with a standard. The light decay time, the measuring principle of CRDS, does not depend on the light intensity of the incident light. Even if the light intensity decreases due to laser aging, the measurement accuracy is not affected. This offers the advantage of high reliability for long-term measurements and reduces the frequency of periodic calibration.
Accurate measurement of residual moisture, even in corrosive gases
It is possible to accurately measure trace moisture ranges that could not be measured using conventional measurement methods (mirror-cooled and capacitive types).
Extremely good response times
By applying the CRDS method and reducing the cavity size, an extremely good response was achieved that is unparalleled. 50 ppbv ⇔ 1000 ppbv ↑60 sec., ↓61 sec. (90% response time)
Stable measurement that is not affected by corrosive gases or other components
Da es sich um eine berührungslose Messung handelt, ist es möglich, korrosive Gase zu handhaben, die mit herkömmlichen Messgeräten nicht gemessen werden könnten.
No sensor degradation and long-term stability
Conventional measurement methods (mirror-cooled and capacitive) generally cause the sensor to deteriorate over time. Because the SHINYEI CRDS method measures the attenuation of the laser beam, it offers high long-term stability, as accuracy is not affected even if the output value changes.
Small dimensions
The sensor area is very small: H165 x W150 x D300 mm
Sensor and monitor can be separated from each other (REMOTE version)
Ease of use and good visibility with a touch panel
The control panel is equipped with a 5-inch touch panel. Operation is intuitive and convenient by simply touching the screen.
It also features large, easy-to-read fonts, making measurements easy to read from a distance.
UJR / VCR Connections
UJR/VCR connections are used to inlet and outlet sample gas. Optional additional connections are available for purging the sensor interior with nitrogen in case sample gas escapes from the cavity.
Analog and digital outputs are available, and central monitoring is also supported.
Optional analog and digital outputs enable the acquisition of measured values into the plant's central monitoring system. Furthermore, it is designed for miniaturization and ease of use and can be handled with the same ease of use as conventional sensor transducers.
Specifications
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|
|---|---|
| Modell |
DewTracer mini CRDS-H2O |
| Measuring principle |
CRDS-Method (Cavity Ring Down Spectroscopy) |
| Range |
12 ppbv ~ 20 ppmv (-100 ~ -55 °CDP), Lower detection limit on request |
| Operating environment |
10 ~ 40 °C, 35 ~ 80% RH or smaller (no condensation) |
| Storage |
-10 ~ 40 °C, 35 ~ 85 % RH or smaller (no condensation) |
| Response time |
50⇔1000 [ppbv] 90 [%] Reaction time on change 60 [sec.] (typ.) |
| Probe gas temperature |
5~60°C or less |
| Sampling flow | <2,0 l/min. |
| Purging flow | <5,0 l/min. |
| Measuring gases | Choose between Air, N2, O2, Ar and many others, including corrosive gases on request |
| Sampling pressure | 86 ~ 106 kPaA (up to ~900 kPaA as a option on request) |
| System accuracy | ±4% or ±12 ppb, whichever is greater |
| Units | Molar volume fraction [ppmv] Measurement unit: gas temperature [°C] Measurement unit: gas pressure [PaA] |
| Calculated Units | Dew/frost temperature [°CDP] |
| LCD-Display | Color-LCD (800×480 WVGA) 5-Zoll-Touchpanel |
| Analog out | 4~20 mA |
| Digital out (optional) | RS-232C |
| Alarm (optional) | Relay contact output |
| Connectors | Sample gas IN-OUT: 1/4"; purge gas IN-OUT: 1/4" |
| Power-Supply | Included Power-Supply (100-240 V, 50 / 60 Hz, 1,4 Amax) |
| Power Consumption | Sensor: 10 W (typ.) Display: 30 W (typ.) |
| Weight | Sensor: ~5 kg (without power supply) + Display: ca. 1,7 kg |
| Dimensions (unit: mm) |
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